Providing an equipment interface which sattisfies SEMI Interface-A standards

A set of interface standards was developed as an initiative of the semiconductor industry which provides a solution for this challenge. The standards are called SEMI E120 - Common Equipment Model; SEMI E125 - Equipment Self Description; SEMI E132 - Authenication (Security); SEMI E134 - Data Collection Management.
There is a good document which describes the motivation and how the SEMI Interface-A interfaces are functioning at Also some use cases are shown there. The single standards can be purchased at
But there are also ready installations of standard compliant interfaces available for the equipment-side and for the client side (,


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